A team led by Prof. SUN Haiding from the University of Science and Technology of China (USTC) developed a vertically integrated micro-scale light-emitting diode (micro-LED) array，which was then ...

In the realm of science and technology, harnessing coherent light sources in the deep ultraviolet (DUV) region holds immense significance across various applications such as lithography, defect ...

Deep ultraviolet (DUV) irradiation is a fast and effective way to inhibit the spread of pathogenic microorganisms, because it can directly destroy the genetic materials of microorganisms or prevent ...

Tokyo, Japan – Scientists from Tokyo Metropolitan University have developed a new electrode material for deep-ultraviolet (DUV) light-emitting diode applications. They used a cutting-edge deposition ...

If EUV is out of reach and access to DUV is tightening, there is a limit to how far chipmakers can go with older gear and new ...

OYAMA, Japan--(BUSINESS WIRE)--Gigaphoton, Inc. , a major lithography light source manufacturer, announced that the company will begin shipping the GT63A, the next-generation ArF excimer laser for ...

Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...

Metalens technology is now moving from proofs-of-concept toward targeted applications in smart glasses and machine vision, as its extreme thinness makes it well-suited for use cases with ...